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Beneq C2R
Beneq’s C2R systems offer the world’s fastest spatial-ALD, supporting low-temperature, plasma-enhanced spatial ALD with growth rates up to 2000 nm/h. With rotation speeds up to 200 rpm and in-situ optical
broadband monitoring (BBM), C2R is the perfect production tool for high throughput optical coatings with tailored plasma ALD processes.
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