The global leader in industrial and research atomic layer deposition (ALD) equipment since 1984
Beneq pioneered industrial production of Atomic Layer Deposition (ALD) with the introduction of the first commercial ALD equipment in 1984. Today, Beneq offers a portfolio of specialty semiconductor production tools, R&D systems, batch tools for chamber part coating, and spatial ALD platforms including roll-to-roll equipment.
In the microLED industry, Beneq ALD systems address a wide range of processes, including sidewall passivation, controlled surface passivation, transparent conductive oxides, and final passivation, enabling the conformality, material flexibility, and low-temperature processing required for high-volume manufacturing of next-generation displays.