Supplying production-proven thin film deposition tools and processes to the world’s leading LED manufacturers
From TCOs ( ITO, AZO, IZO, GZO) & Reflectors ( Metals and DBRs) to metal Contacts and Passivation layers, Evatec has over 20 years experience delivering production proven thin film deposition tools and processes to the world’s leading LED manufacturers.
Evatec production platforms can be equipped with evaporation, sputter . PECVD and PEALD for 4, 6 and 8 inch processing, and are tailored with individual customer hardware and process control features for fully automated cassette to cassette production.
As device architectures get smaller and smaller in Micro LED, Evatec process innovation delivering side wall coverage for maximising light output, hybrid DBRs increasing throughput and ITO process know how reducing particle levels are all helping customers maximise yield and reduce cost of ownership for mass production.